A massive China ASML DUV lithography stockpiling US export ban effort is driving intense debates among policy experts in Washington. According to a report by the Centre for Technology & Statecraft (CTS), Chinese semiconductor fabs acquired approximately 343 deep ultraviolet (DUV) immersion lithography systems by early 2026. Former US export control officials Nicholas Brown and Saif Khan authored the study, urging Western allies to block further equipment sales. Although immersion DUV tools are less advanced than extreme ultraviolet (EUV) systems, Chinese manufacturers adapt them to produce 7-nanometer logic chips and advanced AI processors.
Massive Financial Investments and Semiconductor Adaptation
Chinese chipmakers invested over $13 billion in 2024 and 2025 to secure nearly 180 ASML Twinscan NXT:1980i DUV systems. Consequently, China accounted for 41 percent of ASML’s net system sales in 2024 and 33 percent in 2025. Although sales moderated in early 2026, Chinese factories built a substantial inventory of lithography equipment.
While the Netherlands restricted the more advanced NXT:2000i models in late 2023, shipments of the NXT:1980i continued under case-by-case licensing. Furthermore, experts argue that tools sold for legacy nodes are frequently repurposed for advanced AI chip production, including Huawei’s Ascend series.
Legislative Pressure and Long-Term Technological Impact
In response to the loophole, the report recommends a complete, nation-wide ban on all immersion DUV tools, spare parts, and servicing. Similarly, US lawmakers are pushing the bipartisan Match Act, introduced in April to restrict semiconductor tool sales and maintenance.
Although an immediate export halt would not alter current fab operations, the study projects a dramatic long-term impact. If imports continue, China’s DUV fleet could support an annual production capacity equivalent to 434 million Nvidia H100 AI chips by 2035. Conversely, halting tool shipments by 2027 would cap that potential capacity at 153 million units. Ultimately, closing export loopholes remains a central focus for Western national security strategists.
Reference
South China Morning Post. (2026, October 2). China stockpiles ASML lithography tools, spurring US calls for complete export ban. South China Morning Post. https://www.scmp.com/tech/tech-war/article/3369557/china-stockpiles-asml-lithography-tools-spurring-us-calls-complete-export-ban